S. Ludwig, G. Pedrini, X. Peng, and W. Osten. Optical Measurement Systems for Industrial Inspection XII, 11782, page 1178214. International Society for Optics and Photonics, SPIE, (2021)
S. Reichelt, and G. Pedrini. Proceedings of the 2023 6th International Conference on Machine Vision and Applications, page 72–80. New York, NY, USA, Association for Computing Machinery, (Jun 9, 2023)
A. Toulouse, S. Thiele, and A. Herkommer. Optical Design Challenge 2019, 11040, page 1104009. International Society for Optics and Photonics, SPIE, (2019)
J. Drozella, A. Toulouse, S. Thiele, and A. Herkommer. Novel Optical Systems, Methods, and Applications XXII, 11105, page 1110506. International Society for Optics and Photonics, SPIE, (2019)
S. Thiele, A. Toulouse, S. Ristok, H. Giessen, and A. Herkommer. 3D Printed Optics and Additive Photonic Manufacturing II, 11349, page 1134904. International Society for Optics and Photonics, SPIE, (2020)
M. Gödecke, S. Peterhänsel, D. Buchta, K. Frenner, and W. Osten. Fifth International Conference on Optical and Photonics Engineering, 10449, page 104490C. International Society for Optics and Photonics, SPIE, (2017)
J. Drozella, K. Frenner, and W. Osten. Optical Micro- and Nanometrology VII, 10678, page 106780N. International Society for Optics and Photonics, SPIE, (2018)
M. Gödecke, K. Frenner, and W. Osten. Metrology, Inspection, and Process Control for Microlithography XXXIV, 11325, page 113250V. International Society for Optics and Photonics, SPIE, (2020)
L. Fu, P. Schau, K. Frenner, and W. Osten. Modeling Aspects in Optical Metrology V, 9526, page 95260Z. International Society for Optics and Photonics, SPIE, (2015)
L. Fu, K. Frenner, H. Li, and W. Osten. Optical Micro- and Nanometrology VI, 9890, page 98900I. International Society for Optics and Photonics, SPIE, (2016)
H. Li, L. Fu, K. Frenner, and W. Osten. Modeling Aspects in Optical Metrology VI, 10330, page 103300Y. International Society for Optics and Photonics, SPIE, (2017)
C. Bett, M. Daiber-Huppert, K. Frenner, and W. Osten. Fifteenth International Conference on Machine Vision (ICMV 2022), 12701, page 1270107. International Society for Optics and Photonics, SPIE, (2023)
A. Birk, K. Frenner, and W. Osten. Fifteenth International Conference on Machine Vision (ICMV 2022), 12701, page 1270109. International Society for Optics and Photonics, SPIE, (2023)
S. Amann, T. Haist, A. Gatto, M. Kamm, and A. Herkommer. Photonic Instrumentation Engineering X, 12428, page 124280G. International Society for Optics and Photonics, SPIE, (2023)
J. Liu, Ö. Atmaca, T. Ly, and P. Pott. Beiträge des 9. GMM-Workshops 21. – 22.11.2022 in Aachen, GMM-Fachbericht 105: Mikro-Nano-Integration, page 90-94. VDE, (2022)