%0 Conference Paper
%1 10.1117/12.2269167
%A Gödecke, M. L.
%A Peterhänsel, S.
%A Buchta, D.
%A Frenner, K.
%A Osten, W.
%B Fifth International Conference on Optical and Photonics Engineering
%D 2017
%E Asundi, Anand Krishna
%I SPIE
%K ito karsten_frenner
%P 104490C
%R 10.1117/12.2269167
%T Detection of grating asymmetries by phase-structured illumination
%U https://doi.org/10.1117/12.2269167
%V 10449
@inproceedings{10.1117/12.2269167,
added-at = {2023-06-23T06:22:09.000+0200},
author = {G{\"o}decke, M. L. and Peterh{\"a}nsel, S. and Buchta, D. and Frenner, K. and Osten, W.},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/24e393d59d18d930fff96c5778f2f6a4b/ffischer},
booktitle = {Fifth International Conference on Optical and Photonics Engineering},
doi = {10.1117/12.2269167},
editor = {Asundi, Anand Krishna},
interhash = {11853af6a55cf87e1843b94c9dac2e33},
intrahash = {4e393d59d18d930fff96c5778f2f6a4b},
keywords = {ito karsten_frenner},
organization = {International Society for Optics and Photonics},
pages = {104490C},
publisher = {SPIE},
timestamp = {2023-06-23T06:22:09.000+0200},
title = {{Detection of grating asymmetries by phase-structured illumination}},
url = {https://doi.org/10.1117/12.2269167},
volume = 10449,
year = 2017
}
