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%0 Journal Article
%1 G_decke_2021
%A Gödecke, Maria Laura
%A Frenner, Karsten
%A Osten, Wolfgang
%D 2021
%I Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
%J Light: Advanced Manufacturing
%K ito journal karsten_frenner reviewed
%N 2
%P 1
%R 10.37188/lam.2021.018
%T Model-based characterisation of complex periodic nanostructures by white-light Mueller-matrix Fourier scatterometry
%U https://doi.org/10.37188%2Flam.2021.018
%V 2
@article{G_decke_2021,
added-at = {2023-06-22T13:55:45.000+0200},
author = {Gödecke, Maria Laura and Frenner, Karsten and Osten, Wolfgang},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2c1e67e42694be24b1cd050285513f41e/ffischer},
doi = {10.37188/lam.2021.018},
interhash = {5aba91cbe44fe4314b39725362cb0b47},
intrahash = {c1e67e42694be24b1cd050285513f41e},
journal = {Light: Advanced Manufacturing},
keywords = {ito journal karsten_frenner reviewed},
number = 2,
pages = 1,
publisher = {Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences},
timestamp = {2023-08-10T10:18:12.000+0200},
title = {Model-based characterisation of complex periodic nanostructures by white-light Mueller-matrix Fourier scatterometry},
url = {https://doi.org/10.37188%2Flam.2021.018},
volume = 2,
year = 2021
}
