%0 Journal Article %1 G_decke_2021 %A Gödecke, Maria Laura %A Frenner, Karsten %A Osten, Wolfgang %D 2021 %I Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences %J Light: Advanced Manufacturing %K ito journal karsten_frenner reviewed %N 2 %P 1 %R 10.37188/lam.2021.018 %T Model-based characterisation of complex periodic nanostructures by white-light Mueller-matrix Fourier scatterometry %U https://doi.org/10.37188%2Flam.2021.018 %V 2

@article{G_decke_2021, added-at = {2023-06-22T13:55:45.000+0200}, author = {Gödecke, Maria Laura and Frenner, Karsten and Osten, Wolfgang}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2c1e67e42694be24b1cd050285513f41e/ffischer}, doi = {10.37188/lam.2021.018}, interhash = {5aba91cbe44fe4314b39725362cb0b47}, intrahash = {c1e67e42694be24b1cd050285513f41e}, journal = {Light: Advanced Manufacturing}, keywords = {ito journal karsten_frenner reviewed}, number = 2, pages = 1, publisher = {Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences}, timestamp = {2023-08-10T10:18:12.000+0200}, title = {Model-based characterisation of complex periodic nanostructures by white-light Mueller-matrix Fourier scatterometry}, url = {https://doi.org/10.37188%2Flam.2021.018}, volume = 2, year = 2021 }