%0 Journal Article %1 G_decke_2020 %A Gödecke, Maria Laura %A Bett, Claudia Monika %A Buchta, Dominic %A Frenner, Karsten %A Osten, Wolfgang %D 2020 %I Elsevier BV %J Optics and Lasers in Engineering %K claudia_bett ito journal karsten_frenner reviewed %P 106267 %R 10.1016/j.optlaseng.2020.106267 %T Optical sensor design for fast and process-robust position measurements on small diffraction gratings %U https://doi.org/10.1016%2Fj.optlaseng.2020.106267 %V 134

@article{G_decke_2020, added-at = {2023-06-22T13:56:21.000+0200}, author = {Gödecke, Maria Laura and Bett, Claudia Monika and Buchta, Dominic and Frenner, Karsten and Osten, Wolfgang}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2b787d01c40894df0cdde449f6f88a1d2/ffischer}, doi = {10.1016/j.optlaseng.2020.106267}, interhash = {a2273ef1969aff03fe6634eee6915e47}, intrahash = {b787d01c40894df0cdde449f6f88a1d2}, journal = {Optics and Lasers in Engineering}, keywords = {claudia_bett ito journal karsten_frenner reviewed}, month = nov, pages = 106267, publisher = {Elsevier {BV}}, timestamp = {2023-08-10T10:18:12.000+0200}, title = {Optical sensor design for fast and process-robust position measurements on small diffraction gratings}, url = {https://doi.org/10.1016%2Fj.optlaseng.2020.106267}, volume = 134, year = 2020 }