%0 Journal Article %1 faridian2015phasesensitive %A Faridian, Ahmad %A Paz, Valeriano Ferreras %A Frenner, Karsten %A Pedrini, Giancarlo %A Den Boef, Arie %A Osten, Wolfgang %D 2015 %I SPIE %J Journal of micro/nanolithography, MEMS and MOEMS %K %N 2 %P 021104 %R 10.1117/1.JMM.14.2.021104 %T Phase-sensitive structured illumination to detect nanosized asymmetries in silicon trenches %V 14

@article{faridian2015phasesensitive, added-at = {2023-08-31T15:09:15.000+0200}, affiliation = {Faridian, A (Reprint Author), Univ Stuttgart, Inst Tech Opt, Pfaffenwaldring 9, D-70569 Stuttgart, Germany. Faridian, Ahmad; Paz, Valeriano Ferreras; Frenner, Karsten; Pedrini, Giancarlo; Osten, Wolfgang, Univ Stuttgart, Inst Tech Opt, D-70569 Stuttgart, Germany. Den Boef, Arie, Univ Stuttgart, Stuttgart Res Ctr Photon Engn, D-70569 Stuttgart, Germany. Den Boef, Arie, ASML, NL-5504 DR Veldhoven, Netherlands.}, author = {Faridian, Ahmad and Paz, Valeriano Ferreras and Frenner, Karsten and Pedrini, Giancarlo and Den Boef, Arie and Osten, Wolfgang}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/22db5bc9be1e9bbb3cf19a48fb826263c/puma-wartung}, doi = {10.1117/1.JMM.14.2.021104}, interhash = {7ecd148b9e481daf6d1a612823bc86a7}, intrahash = {2db5bc9be1e9bbb3cf19a48fb826263c}, issn = {{1932-5134} and {1932-5150}}, journal = {Journal of micro/nanolithography, MEMS and MOEMS}, keywords = {}, language = {eng}, number = 2, pages = 021104, publisher = {SPIE}, research-areas = {Engineering; Science & Technology - Other Topics; Materials Science; Optics}, timestamp = {2023-08-31T13:09:15.000+0200}, title = {Phase-sensitive structured illumination to detect nanosized asymmetries in silicon trenches}, unique-id = {ISI:000355286400004}, volume = 14, year = 2015 }