%0 Conference Paper %1 10.1117/12.2551276 %A Gödecke, M. L. %A Frenner, K. %A Osten, W. %B Metrology, Inspection, and Process Control for Microlithography XXXIV %D 2020 %E Adan, Ofer %E Robinson, John C. %I SPIE %K ito karsten_frenner %P 113250V %R 10.1117/12.2551276 %T White-light Mueller-matrix Fourier scatterometry for the characterization of nanostructures with large parameter spaces %U https://doi.org/10.1117/12.2551276 %V 11325

@inproceedings{10.1117/12.2551276, added-at = {2023-06-22T13:57:23.000+0200}, author = {G{\"o}decke, M. L. and Frenner, K. and Osten, W.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2019bf9ec138d973b656916145d717873/ffischer}, booktitle = {Metrology, Inspection, and Process Control for Microlithography XXXIV}, doi = {10.1117/12.2551276}, editor = {Adan, Ofer and Robinson, John C.}, interhash = {c85611ed49337a045b6eb5dade271c10}, intrahash = {019bf9ec138d973b656916145d717873}, keywords = {ito karsten_frenner}, organization = {International Society for Optics and Photonics}, pages = {113250V}, publisher = {SPIE}, timestamp = {2023-06-23T06:37:11.000+0200}, title = {{White-light Mueller-matrix Fourier scatterometry for the characterization of nanostructures with large parameter spaces}}, url = {https://doi.org/10.1117/12.2551276}, volume = 11325, year = 2020 }