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Disambiguation of "Frenner, Karsten"

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Phase-sensitive structured illumination to detect nanosized asymmetries in silicon trenches

, , , , , and . Journal of micro/nanolithography, MEMS and MOEMS, 14 (2): 021104 (2015)
DOI: 10.1117/1.JMM.14.2.021104

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Dr. -Ing. Karsten Frenner University of Stuttgart

Dr. -Ing. Karsten Keller University of Stuttgart

Karsten Schatz University of Stuttgart

Univ. -Prof. Dr. -Ing. Karsten Meier University of Stuttgart

Dr. Karsten Junius University of Stuttgart

 

Other publications of authors with the same name

Experimental demonstration of dispersion engineering through mode interactions in plasmonic microcavities, , , , , , , , , and 1 other author(s). Metamaterials VII, SPIE, (May 2012)Sensorelement für Photolumineszenz-Messungen, Photolumineszenz-Detektionseinrichtung, Verfahren zum Betreiben einer Photolumineszenz-Detektionseinrichtung, Verfahren zur Herstellung eines Sensorelements, und Verwendung eines Sensorelements, , and . (Mar 30, 2017)Cascaded DBR plasmonic cavity lens for far-field subwavelength imaging at a visible wavelength, , , and . Optics Express, 26 (15): 19574-19582 (2018)Scattering imaging as a noise removal in digital holography by using deep learning, , , , , , , , and . New journal of physics, (2022)FeaSel-Net: A Recursive Feature Selection Callback in Neural Networks, , , , , and . Machine Learning and Knowledge Extraction, 4 (4): 968--993 (2022)The promise of metamaterials for new applications in optics, , , , , , , and . Modeling aspects in optical metrology III, 8083, page 808302. Bellingham, Wash., SPIE, (2011)Resolving the depth of fluorescent light by structured illumination and shearing interferometry, , , , , , , , , and . Quantitative Phase Imaging II, 9718, page 97182H. International Society for Optics and Photonics, SPIE, (2016)Detection of overlay error in double patterning gratings using phase-structured illumination, , , , and . Opt. Express, 23 (19): 24246--24256 (September 2015)Simulation of Realistic Speckle Fields by Using Surface Integral Equation and Fast Multipole Method, , , and . SSRN eLibrary, (2022)Polarization scramblers with plasmonic meander-type metamaterials, , , , , , , and . Optics Express, 20 (20): 22700-22711 (2012)