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Novel process integration flow of germanium-on-silicon FinFETs for low-power technologies

S. Choudhary, M. Yogesh, D. Schwarz, H. Funk, S. Ghosh, S. Sharma, J. Schulze, and K. Gonsalves. 41 (5): 052203 (2023)
DOI: 10.1116/6.0002767

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Dr. phil. Christian Jörg University of Stuttgart

Fabian Jörg University of Stuttgart

Jörg Desel

Das ist InformatikJ. Desel (Eds.) Springer, (2001)

Das ist InformatikJ. Desel (Eds.) Springer, (2001)Hilfreiche Hilfe Methode, Implementierung und Evaluation eines Verfahrens zur Adaption an das prozedurale WissenD. Iglezakis. Kath. Universität Eichstätt-Ingolstadt, Aachen, (2007)Hilfreiche Hilfe Methode, Implementierung und Evaluation eines Verfahrens zur Adaption an das prozedurale WissenD. Iglezakis. Kath. Universität Eichstätt-Ingolstadt, Aachen, (2007)

Jörg Förstner University of Stuttgart

Jörg Roth University of Stuttgart

Other publications of authors with the same name

Approaches for III/V Photonics on SiM. Wiesner, W. Schulz, E. Angelopoulos, J. Burghartz, J. Werner, M. Oehme, J. Schulze, R. Roßbach, M. Jetter, and P. Michler. Physics of semiconductors : 30th International Conference on the Physics of Semiconductors . Seoul, Korea, 25 - 30 July 2010, 1399, page 261-262. Melville, New York, AIP, (2010)Ge-on-Si PIN-photodetectors with Al nanoantennas: The effect of nanoantenna size on light scattering into waveguide modesI. Fischer, L. Augel, T. Kropp, S. Jitpakdeebodin, N. Franz, F. Oliveira, E. Rolseth, T. Maß, T. Taubner, and J. Schulze. Applied Physics Letters, (2016)Characterization of thin Boron layers grown on Silicon utilizing molecular beam epitaxy for ultra-shallow pn-junctions.A. Elsayed, and J. Schulze. MIPRO, page 7-11. IEEE, (2018)Electrical Characterization of SiGeSn/Ge/GeSn-pin-Heterodiodes at Low Temperatures.L. Seidel, D. Schwarz, M. Oehme, A. Causevic, H. Funk, D. Weißhaupt, F. Berkmann, and J. Schulze. MIPRO, page 55-59. IEEE, (2021)Composition and magnetic properties of thin films grown by interdiffusion of Mn and Sn-Rich, Ge lattice matched SixGe1-x-ySny layersH. Funk, M. Kern, D. Weißhaupt, C. Sürgers, I. Fischer, M. Oehme, J. Slageren, and J. Schulze. Journal of magnetism and magnetic materials, (2022)An Asymmetrically Doped Vertical Si Biristor With Sub-1-V OperationB. Das, J. Schulze, and U. Ganguly. IEEE transactions on electron devices, 68 (8): 3728-3733 (2021)An 82-GHz 14.6-mW Output Power Silicon Impact Ionization Avalanche Transit Time Transmitter With Monolithically Integrated Coplanar Waveguide Patch AntennaW. Zhang, E. Kasper, and J. Schulze. IEEE Transactions on Microwave Theory and Techniques, 67 (1): 308-317 (2018)Room Temperature Direct Band-Gap Emission from an Unstrained Ge P-I-N LED on SiT. Arguirov, M. Kittler, M. Oehme, N. Abrosimov, E. Kasper, and J. Schulze. Gettering and Defect Engineering in Semiconductor Technology XIV : GADEST 2011, 178, page 25-30. Durnten, Trans Tech Publications, (2011)The Zener-Emitter : Electron injection by direct-tunneling in Ge LEDs for the on-chip Si light sourceR. Koerner, M. Oehme, K. Kostecki, I. Fischer, E. Rolseth, S. Bechler, M. Yorgidis, A. Blech, O. Latzl, and J. Schulze. 2016 74th Annual Device Research Conference (DRC), page 1-2. IEEE, (2016)Structure and composition of Silicon-Germanium-Tin microstructures obtained through Mask Projection assisted Pulsed Laser Induced EpitaxyS. Stefanov, C. Serra, A. Benedetti, J. Conde, J. Werner, M. Oehme, J. Schulze, S. Wirths, D. Buca, and S. Chiussi. Microelectronic Engineering, (2014)

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Disambiguation of "Schulze, Jörg"

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Novel process integration flow of germanium-on-silicon FinFETs for low-power technologies

Please choose a person to relate this publication to

Dr. phil. Christian Jörg University of Stuttgart

Fabian Jörg University of Stuttgart

Jörg Desel

Jörg Förstner University of Stuttgart

Jörg Roth University of Stuttgart

Other publications of authors with the same name

Disambiguation

PUMA

Disambiguation of "Schulze, Jörg"

copydeleteadd this publication to your clipboardcommunity posthistory of this postURLDOIBibTeXEndNoteAPAChicagoDIN 1505HarvardMSOffice XML Novel process integration flow of germanium-on-silicon FinFETs for low-power technologies

Please choose a person to relate this publication to

Dr. phil. Christian Jörg University of Stuttgart

Fabian Jörg University of Stuttgart

Jörg Desel

Jörg Förstner University of Stuttgart

Jörg Roth University of Stuttgart

Other publications of authors with the same name

Disambiguation

copy delete add this publication to your clipboard
community post
history of this post
URL
DOI
BibTeX
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APA
Chicago
DIN 1505
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Novel process integration flow of germanium-on-silicon FinFETs for low-power technologies