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%0 Conference Paper
%1 conf/mipro/ElsayedS18
%A Elsayed, Ahmed
%A Schulze, Jörg
%B MIPRO
%D 2018
%E Skala, Karolj
%E Koricic, Marko
%E Grbac, Tihana Galinac
%E Cicin-Sain, Marina
%E Sruk, Vlado
%E Ribaric, Slobodan
%E Gros, Stjepan
%E Vrdoljak, Boris
%E Mauher, Mladen
%E Tijan, Edvard
%E Pale, Predrag
%E Janjic, Matej
%I IEEE
%K dblp
%P 7-11
%T Characterization of thin Boron layers grown on Silicon utilizing molecular beam epitaxy for ultra-shallow pn-junctions.
%U http://dblp.uni-trier.de/db/conf/mipro/mipro2018.html#ElsayedS18
%@ 978-953-233-095-3
@inproceedings{conf/mipro/ElsayedS18,
added-at = {2019-11-28T00:00:00.000+0100},
author = {Elsayed, Ahmed and Schulze, Jörg},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/22c56c29af4b6eabd3368fc7f7e918524/dblp},
booktitle = {MIPRO},
crossref = {conf/mipro/2018},
editor = {Skala, Karolj and Koricic, Marko and Grbac, Tihana Galinac and Cicin-Sain, Marina and Sruk, Vlado and Ribaric, Slobodan and Gros, Stjepan and Vrdoljak, Boris and Mauher, Mladen and Tijan, Edvard and Pale, Predrag and Janjic, Matej},
ee = {https://doi.org/10.23919/MIPRO.2018.8399821},
interhash = {f0706ef937a24bbcae6074d935795803},
intrahash = {2c56c29af4b6eabd3368fc7f7e918524},
isbn = {978-953-233-095-3},
keywords = {dblp},
pages = {7-11},
publisher = {IEEE},
timestamp = {2019-12-11T13:08:27.000+0100},
title = {Characterization of thin Boron layers grown on Silicon utilizing molecular beam epitaxy for ultra-shallow pn-junctions.},
url = {http://dblp.uni-trier.de/db/conf/mipro/mipro2018.html#ElsayedS18},
year = 2018
}
