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Development of micromachined switches with increased reliability

K. Hiltmann, B. Schmidt, H. Sandmaier, and W. Lang. Transducers 97 : digest of technical papers, 2, page 1157-1160. Piscataway, NJ, IEEE, (1997)
DOI: 10.1109/SENSOR.1997.635410

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Hermann Sandmaier University of Stuttgart

Dr. Hermann Kurz University of Stuttgart

Prof. Dr. Hermann Schnabl University of Stuttgart

Christian Hermann University of Stuttgart

Sibylle Hermann University of Stuttgart

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Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-PatterningM. Haub, M. Bogner, T. Guenther, A. Zimmermann, and H. Sandmaier. Sensors, (2021)Absorbing layers for thermal infrared detectorsK. Kühl, W. Lang, and H. Sandmaier. Transducers '91 : digest of technical papers, page 635-638. New York, NY, IEEE, (1991)Flüssigkeitsbasierte Mikromontage mit Nanostrukturen; Liquid-based Mikroassembly with NanostructuresN. Boufercha, J. Sägebarth, D. Schlenker, and H. Sandmaier. Mikro-Nano-Integration : Beiträge des 1. GMM-Workshops, 60, Berlin, VDE-Verl., (2009)Mikromontage mit FlüssigkeitenN. Boufercha, J. Sägebarth, N. Othman, W. Schäfer, D. Schlenker, M. Burgard, and H. Sandmaier. Mikroproduktion, 6 (3): 14-16 (2008)Electrostatic driven 3-way silicon microvalve for pneumatic applicationsS. Messner, J. Schaible, J. Vollmer, H. Sandmaier, and R. Zengerle. Proceedings / MEMS 2003, IEEE the Sixteenth Annual International Conference on Micro Electro Mechanical Systems, page 88-91. Piscataway, NJ, IEEE Operations Center, (2003)Mikromechanische Drehratensensoren für Kfz-AnwendungenA. Gaißer, A. Schuhmacher, J. Frech, J. Auber, M. Braxmaier, T. Link, B. Ehrbrecht, P. Nommensen, H. Sandmaier, and W. Lang. Begleittexte zum Entwicklerforum Kfz-Elektronik, Poing, Design & Elektronik, (2002)Novel Approaches to Particle Tolerant Valves for Use in Drug Delivery SystemsT. Goettsche, J. J. Kohnle, M. Willmann, H. Ernst, S. Spieht, R. Tritschler, S. Messner, R. Zengerle, and H. Sandmaier. Sensors and actuators. A, Physical, 118 (1): 70-77 (2005)Dispensing well plate (DWP): a highly integrated nanoliter dispensing systemP. Koltay, B. Bohl, S. Taoufik, R. Steger, S. Messner, H. Sandmaier, and R. Zengerle. Transducers '03 : digest of technical papers, 1, page 16-19. Piscataway, NJ, IEEE, (2003)DWP - A New Nanoliter Liquid Handling Tool for uHTSJ. Comley, P. Koltay, R. Steger, R. Zengerle, H. Sandmaier, G. Knebel, A. Gerlach, and N. Gottschlich. (2002)Low cost micromachined gyroscope in SOI-TechnologyA. Gaißer, J. Frech, P. Nommensen, G. Hölzer, M. Braxmeier, T. Link, W. Geiger, U. Schwarz, H. Sandmaier, and W. Lang. Advanced microsystems for automotive applications, Berlin, Springer, (2002)