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Disambiguation of "Haub, Michael"

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Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning

, , , , and . Sensors, (2021)
DOI: 10.3390/s21113795

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Sabrina Haubold University of Stuttgart

apl. Prof. Dr. Wolfgang Hauber University of Stuttgart

Michael Böhm

Michael Funk

Hon. -Prof. Dr. -Ing. Michael Bauer University of Stuttgart

 

Other publications of authors with the same name

Focused ion beam writing of submicron structures into coated mold inserts, , , , and . Proceedings of the 21st international conference of the european society for precision engineering and nanotechnology, page 137-140. european society for precision engineering and nanotechnology, (June 2021)Miniaturisierung von Beschleunigungssensoren auf Basis des Tunneleffekts. Universität Stuttgart, Stuttgart, Dissertation, (2023)Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning, , , , and . Sensors, 21 (11): 3795 (2021)Investigation of Focused Ion and Electron Beam Platinum Carbon Nano-Tips with Transmission Electron Microscopy for Quantum Tunneling Vacuum Gap Applications, , , and . Applied Sciences, 11 (24): 11793 (2021)Use of PtC Nanotips for Low-Voltage Quantum Tunneling Applications, , , and . Micromachines, (2022)Investigation of Focused Ion and Electron Beam Platinum Carbon Nano-Tips with Transmission Electron Microscopy for Quantum Tunneling Vacuum Gap Applications, , , and . Applied Sciences, 11 (24): 11793 (2021)Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning, , , , and . Sensors, (2021)Use of PtC Nanotips for Low-Voltage Quantum Tunneling Applications, , , and . Micromachines, 13 (7): 1019 (2022)