%0 Conference Paper %1 messner2003electrostatic %A Messner, Stephan %A Schaible, Jochen %A Vollmer, J. %A Sandmaier, Hermann %A Zengerle, Roland %B Proceedings / MEMS 2003, IEEE the Sixteenth Annual International Conference on Micro Electro Mechanical Systems %C Piscataway, NJ %D 2003 %I IEEE Operations Center %K %P 88-91 %R 10.1109/MEMSYS.2003.1189694 %T Electrostatic driven 3-way silicon microvalve for pneumatic applications %X For the first time we present a normally-closed electrostatic driven 3-way microvalve which is able to meet requirements of industrial applications like small form factor, high flow rate, low weight, low power consumption and a short response time. The microvalve consists of a 3 layer silicon chip stack mounted on a ceramics substrate, covered by a plastic cap. A driver electronics which converts TTL level to the actuation voltage of 200 V is put on top of the valve. The valve operates in a pressure range of up to 10 bar and has a flow rate of approx. 500 ml/min. Due to the electrostatic actuation principle the power consumption is below 5 mW and the response time is below 1 ms %@ 0-7803-7744-3

@inproceedings{messner2003electrostatic, abstract = {For the first time we present a normally-closed electrostatic driven 3-way microvalve which is able to meet requirements of industrial applications like small form factor, high flow rate, low weight, low power consumption and a short response time. The microvalve consists of a 3 layer silicon chip stack mounted on a ceramics substrate, covered by a plastic cap. A driver electronics which converts TTL level to the actuation voltage of 200 V is put on top of the valve. The valve operates in a pressure range of up to 10 bar and has a flow rate of approx. 500 ml/min. Due to the electrostatic actuation principle the power consumption is below 5 mW and the response time is below 1 ms}, added-at = {2023-09-01T10:40:08.000+0200}, address = {Piscataway, NJ}, author = {Messner, Stephan and Schaible, Jochen and Vollmer, J. and Sandmaier, Hermann and Zengerle, Roland}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2d8e48e2b364028be5bdf21ed6ca181f9/unibiblio-4}, booktitle = {Proceedings / MEMS 2003, IEEE the Sixteenth Annual International Conference on Micro Electro Mechanical Systems}, doi = {10.1109/MEMSYS.2003.1189694}, eventdate = {2003-01-19/2003-01-23}, eventtitle = {MEMS 2003, IEEE the Sixteenth Annual International Conference on Micro Electro Mechanical Systems}, interhash = {6e7e1440bd6bf210e2037a4e91e54b3f}, intrahash = {d8e48e2b364028be5bdf21ed6ca181f9}, isbn = {0-7803-7744-3}, keywords = {}, language = {eng}, pages = {88-91}, publisher = {IEEE Operations Center}, timestamp = {2023-09-01T08:40:08.000+0200}, title = {Electrostatic driven 3-way silicon microvalve for pneumatic applications}, venue = {Kyoto, Japan}, year = 2003 }