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Electrostatic driven 3-way silicon microvalve for pneumatic applications

, , , , and . Proceedings / MEMS 2003, IEEE the Sixteenth Annual International Conference on Micro Electro Mechanical Systems, page 88-91. Piscataway, NJ, IEEE Operations Center, (2003)
DOI: 10.1109/MEMSYS.2003.1189694

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A normally-closed, bimetallically actuated 3-way microvalve for pneumatic applications, , , , , and . Proceedings / IEEE The Eleventh Annual International Workshop on Micro-Electro-Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems, page 40-44. Piscataway, NJ, IEEE Service Centrum, (1998)3-way silicon microvalve for pneumatic applications with electrostatic actuation principle, , , and . Microfluidics and nanofluidics, 2 (2): 89-96 (2006)Electrostatic driven 3-way silicon microvalve for pneumatic applications, , , , and . Proceedings / MEMS 2003, IEEE the Sixteenth Annual International Conference on Micro Electro Mechanical Systems, page 88-91. Piscataway, NJ, IEEE Operations Center, (2003)