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A normally-closed, bimetallically actuated 3-way microvalve for pneumatic applications

S. Messner, M. Müller, V. Burger, J. Schaible, H. Sandmaier, and R. Zengerle. Proceedings / IEEE The Eleventh Annual International Workshop on Micro-Electro-Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems, page 40-44. Piscataway, NJ, IEEE Service Centrum, (1998)
DOI: 10.1109/MEMSYS.1998.659726

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Alexander Müller

Timo Müller University of Stuttgart

Niklas Müller University of Stuttgart

Theresa Müller University of Stuttgart

Johannes Müller University of Stuttgart

Other publications of authors with the same name

Bondgraph execution as a new algorithm for circuit simulation.M. Müller. VLSI, volume A-42 of IFIP Transactions, page 343-352. North-Holland, (1993)Advances in foundry SiGe HBT BiCMOS processes through modeling and device scaling for ultra-high speed applications.S. Phillips, E. Preisler, J. Zheng, S. Chaudhry, M. Racanelli, M. Müller, M. Schröter, W. McArthur, and D. Howard. BCICTS, page 1-5. IEEE, (2021)Mesoscopic Rydberg Gate Based on Electromagnetically Induced TransparencyM. Müller, I. Lesanovsky, H. Weimer, H. Büchler, and P. Zoller. Phys. Rev. Lett., 102 (17): 170502 (April 2009)Optimization of a Part Holder Design Considering Dynamic Loads during Return Stroke of Tool and RamM. Burkart, M. Liewald, J. Wied, T. Todzy, M. Hartmann, and M. Müller. Procedia Manufacturing, (2020)Compensation of elastic die and press deformations during sheet metal forming by optimizing blank holder designM. Burkart, P. Essig, M. Liewald, M. Beck, and M. Müller. International Deep-Drawing Research Group (IDDRG 2020), 967, page 012074. Institute of Physics, (2020)3-way microvalve for pneumatic applications fabricated by silicon micromachiningS. Messner, M. Müller, V. Burger, J. Schaible, H. Sandmaier, and R. Zengerle. Micro-electro-mechanical systems (MEMS) - 1998 : presented at the 1998 ASME International Mechanical Engineering Congress and Exposition, 66, page 159-164. New York, NY, ASME, (1998)Offen und flexibel. Konfigurierbares Bediensystem für offene Steuerungen auf PC-Basis. Elektronik 45 (1997) 16, S. 52...56. Offen und flexibel. Konfigurierbares Bediensystem für offene Steuerungen auf PC-Basis. Elektronik 45 (1997) 16, S. 52...56.G. Bauer, M. Müller, and W. Schittenhelm. (1997)Direct imaging of GaN Pyramids covered by InGaN Single Quantum Well using nano-scale Scanning Transmission Electron Microscopy CathodoluminescenceM. Müller, G. Schmidt, S. Metzner, F. Bertram, S. Petzold, P. Veit, J. Christen, C. Wächter, M. Jetter, and P. Michler. 18 (S2): 1838-1839-- (2012)Tailoring (S)-selectivity of MenD from Escherichia coliR. Westphal, D. Hahn, U. Mackfeld, S. Waltzer, M. Beigi, M. Widmann, C. Vogel, J. Pleiss, M. Müller, and M. Pohl. ChemCatChem, (2013)Rational protein design of ThDP-dependent enzymes: engineering stereoselectivityD. Gocke, L. Walter, E. Gauchenova, G. Kolter, M. Knoll, C. Berthold, G. Schneider, J. Pleiss, M. Müller, and M. Pohl. ChemBioChem, (2008)