3-way microvalve for pneumatic applications fabricated by silicon micromachining
S. Messner, M. Müller, V. Burger, J. Schaible, H. Sandmaier, and R. Zengerle. Micro-electro-mechanical systems (MEMS) - 1998 : presented at the 1998 ASME International Mechanical Engineering Congress and Exposition, 66, page 159-164. New York, NY, ASME, (1998)
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