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Mikromechanische Drehratensensoren für Kfz-Anwendungen

, , , , , , , , , and . Begleittexte zum Entwicklerforum Kfz-Elektronik, Poing, Design & Elektronik, (2002)

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Mikromechanische Drehratensensoren für Kfz-Anwendungen, , , , , , , , , and . Begleittexte zum Entwicklerforum Kfz-Elektronik, Poing, Design & Elektronik, (2002)Low cost micromachined gyroscope in SOI-Technology, , , , , , , , , and . Advanced microsystems for automotive applications, Berlin, Springer, (2002)Decoupled microgyros and the design principle DAVED, , , , , , , , , and . Papers from the Proceedings of the 14th IEEE Internat. Conf. on MicroElectroMechanical Systems (MEMS 2001), 95, 2/3, page 239-249. Amsterdam, Elsevier, (2002)DAVED-LL - A Novel Gyroscope in SOI-Technology, , , , , , , , and . Ortung und Navigation, (2001)Prozessbegleitende Messtechnik und Endprüfung in der Mikrosystemtechnik, , and . Metrologie in der Mikro- und Nanotechnik, 1669, page 85-94. Düsseldorf, VDI-Verl., (2003)Decoupled microgyros and the design principle DAVED, , , , , , , , , and . Technical digest / MEMS 2001, the 14th IEEE International Conference on Micro Electro Mechanical Systems, page 170-173. Piscataway, NJ, IEEE, (2001)