%0 Conference Paper %1 hiltmann1997development %A Hiltmann, K. M. %A Schmidt, B. %A Sandmaier, Hermann %A Lang, Walter %B Transducers 97 : digest of technical papers %C Piscataway, NJ %D 1997 %I IEEE %K %P 1157-1160 %R 10.1109/SENSOR.1997.635410 %T Development of micromachined switches with increased reliability %V 2 %@ 0-7803-3829-4

@inproceedings{hiltmann1997development, added-at = {2023-09-01T10:42:00.000+0200}, address = {Piscataway, NJ}, author = {Hiltmann, K. M. and Schmidt, B. and Sandmaier, Hermann and Lang, Walter}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/242d6824195463a0c565e19b3d20b4537/unibiblio-4}, booktitle = {Transducers 97 : digest of technical papers}, doi = {10.1109/SENSOR.1997.635410}, eventdate = {1997-06-16/1997-06-19}, eventtitle = {1997 International Conference on Solid-State Sensors and Actuators}, interhash = {c9183de9eeee171b1ed900ba8251829e}, intrahash = {42d6824195463a0c565e19b3d20b4537}, isbn = {0-7803-3829-4}, keywords = {}, language = {eng}, pages = {1157-1160}, publisher = {IEEE}, timestamp = {2023-09-01T08:42:00.000+0200}, title = {Development of micromachined switches with increased reliability}, venue = {Chicago, IL, USA}, volume = 2, year = 1997 }