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Disambiguation of "Paz, Valeriano Ferreras"

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Detection of overlay error in double patterning gratings using phase-structured illumination

, , , , and . Optics express, 23 (19): 24246-24256 (2015)
DOI: 10.1364/OE.23.024246

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Hayati Kadir Pazarlioglu University of Stuttgart

 

Other publications of authors with the same name

Detection of overlay error in double patterning gratings using phase-structured illumination, , , , and . Opt. Express, 23 (19): 24246--24256 (September 2015)Design and fabrication of near- to far-field transformers by sub-100 nm two-photon polymerization, , , , , , , , and . Optically Induced Nanostructures, page 73-92. (January 2015)Erweiterungen der Scatterometrie zur modellbasierten optischen Nanometrologie von Halbleiterstrukturen. Universität Stuttgart, Stuttgart, Dissertation, (2019)Development of functional sub-100 nm structures with 3D two-photon polymerization technique and optical methods for characterization, , , , , , , , , and . Journal of Laser Applications, (July 2012)Increasing Scatterometric Sensitivity by Simulation Based Optimization of Structure Design, , and . Fringe 2013, page 345--348. Berlin, Heidelberg, Springer Berlin Heidelberg, (2014)Detection of overlay error in double patterning gratings using phase-structured illumination, , , , and . Optics express, 23 (19): 24246-24256 (2015)Solving the inverse grating problem by white light interference Fourier scatterometry, , , and . Light: Science & Applications, (November 2012)Fieldstitching with Kirchhoff-boundaries as a model based description for line edge roughness (LER) in scatterometry, , , , and . Microelectronic Engineering, 86 (4-6): 1029--1032 (April 2009)Phase-sensitive structured illumination to detect nanosized asymmetries in silicon trenches, , , , , and . Journal of micro/nanolithography, MEMS and MOEMS, 14 (2): 021104 (2015)