%0 Journal Article %1 article %A Ferreras Paz, Valeriano %A Peterhänsel, Sandy %A Frenner, Karsten %A Osten, Wolfgang %D 2012 %J Light: Science & Applications %K hms ito reviewed %R 10.1038/lsa.2012.36 %T Solving the inverse grating problem by white light interference Fourier scatterometry %V 1

@article{article, added-at = {2019-05-03T12:58:04.000+0200}, author = {Ferreras Paz, Valeriano and Peterhänsel, Sandy and Frenner, Karsten and Osten, Wolfgang}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2bb621b9b8332e0569dc02c6c6cd11d7d/heidrunkempf}, doi = {10.1038/lsa.2012.36}, interhash = {a80d2361a4709e7d8d5598bffe17c179}, intrahash = {bb621b9b8332e0569dc02c6c6cd11d7d}, journal = {Light: Science & Applications}, keywords = {hms ito reviewed}, month = {11}, timestamp = {2019-05-03T10:58:04.000+0200}, title = {Solving the inverse grating problem by white light interference Fourier scatterometry}, volume = 1, year = 2012 }