%0 Journal Article %1 peterhansel2015detection %A Peterhänsel, Sandy %A Gödecke, Maria Laura %A Paz, Valeriano Ferreras %A Frenner, Karsten %A Osten, Wolfgang %D 2015 %I Optical Society of America %J Optics express %K %N 19 %P 24246-24256 %R 10.1364/OE.23.024246 %T Detection of overlay error in double patterning gratings using phase-structured illumination %V 23

@article{peterhansel2015detection, added-at = {2023-08-31T16:49:11.000+0200}, affiliation = {Peterhansel, S (Reprint Author), Univ Stuttgart, Inst Tech Opt, D-70174 Stuttgart, Germany. Peterhaensel, Sandy, Univ Stuttgart, Inst Tech Opt, D-70174 Stuttgart, Germany. Univ Stuttgart, Res Ctr SCoPE, D-70174 Stuttgart, Germany.}, author = {Peterhänsel, Sandy and Gödecke, Maria Laura and Paz, Valeriano Ferreras and Frenner, Karsten and Osten, Wolfgang}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2a8279d4abdc2ccb1114d5aa9cc3a2e95/puma-wartung}, doi = {10.1364/OE.23.024246}, interhash = {b3768f8ddd5049d5d6ebd7bbfacbde8a}, intrahash = {a8279d4abdc2ccb1114d5aa9cc3a2e95}, issn = {1094-4087}, journal = {Optics express}, keywords = {}, language = {eng}, number = 19, pages = {24246-24256}, publisher = {Optical Society of America}, research-areas = {Optics}, timestamp = {2023-08-31T14:49:11.000+0200}, title = {Detection of overlay error in double patterning gratings using phase-structured illumination}, unique-id = {ISI:000365076400045}, volume = 23, year = 2015 }