%0 Journal Article %1 Schuster_2009 %A Schuster, Thomas %A Rafler, Stephan %A Paz, Valeriano Ferreras %A Frenner, Karsten %A Osten, Wolfgang %D 2009 %I Elsevier BV %J Microelectronic Engineering %K hms ito reviewed %N 4-6 %P 1029--1032 %R 10.1016/j.mee.2008.11.019 %T Fieldstitching with Kirchhoff-boundaries as a model based description for line edge roughness (LER) in scatterometry %U https://doi.org/10.1016%2Fj.mee.2008.11.019 %V 86

@article{Schuster_2009, added-at = {2019-05-06T13:33:49.000+0200}, author = {Schuster, Thomas and Rafler, Stephan and Paz, Valeriano Ferreras and Frenner, Karsten and Osten, Wolfgang}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/22a8ec524e6aed590894ef541565d22dc/vogelfrau}, doi = {10.1016/j.mee.2008.11.019}, interhash = {d75d77bb86d7d4d2bb9652379e7e2c8d}, intrahash = {2a8ec524e6aed590894ef541565d22dc}, journal = {Microelectronic Engineering}, keywords = {hms ito reviewed}, month = apr, number = {4-6}, pages = {1029--1032}, publisher = {Elsevier {BV}}, timestamp = {2019-05-06T11:33:49.000+0200}, title = {Fieldstitching with Kirchhoff-boundaries as a model based description for line edge roughness ({LER}) in scatterometry}, url = {https://doi.org/10.1016%2Fj.mee.2008.11.019}, volume = 86, year = 2009 }