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Ion-Implanted Base SiGe PNP Self-Aligned SEEW Transistors

, , , , , , , , , and . Proceedings of the 1991 Bipolar Circuits and Technology Meeting, Minneapolis Marriott City Center Hotel, September 9 - 10, 1991, page 75-78. Piscataway, New Jersey, IEEE, (1991)
DOI: 10.1109/BIPOL.1991.160960

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A Low-Capacitance Bipolar/BiCMOS Isolation Technology : I : Concept, Fabrication Process, and Characterization, , and . IEEE Transactions on Electron Devices, 41 (8): 1379-1387 (August 1994)Novel Bipolar Transistor Isolation Structure Using Combined Selective Epitaxial Growth and Planarization Technique, , , , , , , , , and 2 other author(s). Proceedings of the 22nd European Solid State Device Research Conference Leuven, 14-17 September 1992, page 531-534. Amsterdam, Elsevier, (1992)SPIRIT : A Bipolar/BiCMOS Isolation Technology For High-Performance VLSI, , , , , , , , and . Digest of technical papers : 1993 Symposium on VLSI Technology : May 17 - 19, 1993, Kyoto, page 143-144. Piscataway, New Jersey, IEEE, (1993)Ion-Implanted Base SiGe PNP Self-Aligned SEEW Transistors, , , , , , , , , and . Proceedings of the 1991 Bipolar Circuits and Technology Meeting, Minneapolis Marriott City Center Hotel, September 9 - 10, 1991, page 75-78. Piscataway, New Jersey, IEEE, (1991)