%0 Journal Article %1 peterhansel2016phasestructured %A Peterhänsel, Sandy %A Gödecke, Maria Laura %A Frenner, Karsten %A Osten, Wolfgang %D 2016 %I SPIE %J Journal of micro/nanolithography, MEMS and MOEMS %K %N 4 %P 044005 %R 10.1117/1.JMM.15.4.044005 %T Phase-structured illumination as a tool to detect nanometer asymmetries %V 15

@article{peterhansel2016phasestructured, added-at = {2023-08-31T15:09:14.000+0200}, affiliation = {Peterhansel, S (Reprint Author), Univ Stuttgart, Pfaffenwaldring 9, D-70569 Stuttgart, Germany. Peterhaensel, Sandy, Univ Stuttgart, Pfaffenwaldring 9, D-70569 Stuttgart, Germany. Res Ctr SCoPE, Inst Appl Opt, Pfaffenwaldring 9, D-70569 Stuttgart, Germany.}, author = {Peterhänsel, Sandy and Gödecke, Maria Laura and Frenner, Karsten and Osten, Wolfgang}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/262c4c384beef6f4bd818126610e56143/puma-wartung}, doi = {10.1117/1.JMM.15.4.044005}, interhash = {cdc9bf56b0f869ccfed9c588e630050c}, intrahash = {62c4c384beef6f4bd818126610e56143}, issn = {{1932-5134} and {1932-5150}}, journal = {Journal of micro/nanolithography, MEMS and MOEMS}, keywords = {}, language = {eng}, number = 4, pages = 044005, publisher = {SPIE}, research-areas = {Engineering; Science & Technology - Other Topics; Materials Science; Optics}, timestamp = {2023-08-31T13:09:14.000+0200}, title = {Phase-structured illumination as a tool to detect nanometer asymmetries}, unique-id = {ISI:000397068400016}, volume = 15, year = 2016 }