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Phase-structured illumination as a tool to detect nanometer asymmetries

S. Peterhänsel, M. Gödecke, K. Frenner, and W. Osten. Journal of micro/nanolithography, MEMS and MOEMS, 15 (4): 044005 (2016)
DOI: 10.1117/1.JMM.15.4.044005

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Dr. -Ing. Karsten Frenner University of Stuttgart

Dr. -Ing. Karsten Keller University of Stuttgart

Karsten Schatz University of Stuttgart

Univ. -Prof. Dr. -Ing. Karsten Meier University of Stuttgart

Dr. Karsten Junius University of Stuttgart

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