H. Rühl, T. Günther, and A. Zimmermann. Proceedings of the World Congress on Micro and Nano Manufacturing (WCMNM 2022), page 63-66. Singapore, Research Publishing, (2022)
H. Ruehl, T. Guenther, and A. Zimmermann. Proceedings of the World Congress on Micro and Nano Manufacturing (WCMNM 2022), page 63-66. Blk 11 Upper Boon Keng Road,, #12-931, Singapore 380011, Research Publishing (S) Pte Ltd, (2022)