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Amorphous silicon carbide and its application in silicon micromachining

A. Klumpp, U. Schaber, H. Offerins, K. Kuhl, and H. Sandmaier. Proceedings of Eurosensors VII, volume 3 of Sensors and actuators. A, Physical, page 310-316. Lausanne, Elsevier, (1994)
DOI: 10.1016/0924-4247(94)80129-0

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U. Schleinkofer

Rüdiger Utikal University of Stuttgart

Stefanie Ungar University of Stuttgart

Junaid Ullah University of Stuttgart

Jens Ullmann University of Stuttgart

Other publications of authors with the same name

Study of doping dependent p-n junction etch-stop using pulsed electrochemical anodizationU. Schaber, H. Offereins, S. Seitz, H. Gronegger, K. Kühl, and H. Sandmaier. (1992)Bulk micromachining using doping dependent p-n junction etch-stopU. Schaber, H. Offereins, K. Kühl, H. Gronegger, S. Vogel, and H. Sandmaier. Micro-system technologies '94, Berlin, vde-Verl., (1994)A monolithically integrated sensor system using sensor-specific CMOS cellsJ. Weber, S. Seitz, U. Steger, B. Folkmer, U. Schaber, A. Plettner, H. Offereins, H. Sandmaier, and E. Lindner. Proceedings of Eurosensors VIII, volume 3 of Sensors and actuators. A, Physical, page 137-142. (1995)Bulk micromachining using doping dependent p-n junction etch-stopU. Schaber, H. Offereins, K. Kühl, H. Gronegger, S. Vogel, and H. Sandmaier. Proceedings of the Second International Symposium on Electrochemical Technology Applications in Electronics, 93-20, page 257-264. Pennington, NJ, Electrochemical Society, (1993)Amorphous silicon carbide and its application in silicon micromachiningA. Klumpp, U. Schaber, H. Offerins, K. Kuhl, and H. Sandmaier. Proceedings of Eurosensors VII, volume 3 of Sensors and actuators. A, Physical, page 310-316. Lausanne, Elsevier, (1994)a.SiC films: deposition and application in silicon micromachiningA. Klumpp, K. Kühl, W. Lang, H. Sandmaier, and U. Schaber. Micro system technologies '94 : 4th International Conference on Micro Electro, Opto, Mechanical Systems and Components, page 289-298. Berlin, VDE-Verl., (1994)