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Amorphous silicon carbide and its application in silicon micromachining

A. Klumpp, U. Schaber, H. Offerins, K. Kuhl, and H. Sandmaier. Proceedings of Eurosensors VII, volume 3 of Sensors and actuators. A, Physical, page 310-316. Lausanne, Elsevier, (1994)
DOI: 10.1016/0924-4247(94)80129-0

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Univ. -Prof. Dr. -Ing. Ulrike Kuhlmann University of Stuttgart

Tim Kühlthau University of Stuttgart

Lennart Kühl University of Stuttgart

Dr. -Ing. Timm Kuhlmann University of Stuttgart

Melanie Christine Kühlem University of Stuttgart

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Compensation of Convex Corners in aqueous KOH-EtchingH. Offereins, H. Sandmaier, K. Kühl, and W. Lang. Micro system technologies 91 : 2nd International Conference on Micro Electro, Opto, Mechanical Systems and Components, page 332-337. Berlin, vde-Verl., (1991)Studie MikromechanikH. Sandmaier, K. Kühl, and L. Csepregi. Mikro-Elektronik, (1991)Methods for the fabrication of convex corners in anisotropic etching of (100) silicon in aqueous KOHH. Offereins, K. Kühl, and H. Sandmaier. Proceedings of Eurosensors IV held jointly with Sensoren, Technologie und Anwendung, 25, 1/3, page 9-13. Lausanne, Elsevier Sequoia, (1991)Amorphous silicon carbide and its application in silicon micromachiningA. Klumpp, U. Schaber, H. Offerins, K. Kuhl, and H. Sandmaier. Proceedings of Eurosensors VII, volume 3 of Sensors and actuators. A, Physical, page 310-316. Lausanne, Elsevier, (1994)An Anisotropically Etched Silicon Micro-Accelerometer with Transverse Sensivity CompensationE. Obermeier, H. Sandmaier, and K. Kühl. An Investigation of micromechanical structures, actuators, and sensors : proceedings, New York, NY, IEEE, (1987)a.SiC films: deposition and application in silicon micromachiningA. Klumpp, K. Kühl, W. Lang, H. Sandmaier, and U. Schaber. Micro system technologies '94 : 4th International Conference on Micro Electro, Opto, Mechanical Systems and Components, page 289-298. Berlin, VDE-Verl., (1994)Fabrication of non-underetched convex corners in anisotropic etching of 100-silicon in aqueous KOH with respect to novel micromechanic elementsG. Mayer, H. Offereins, K. Kühl, and H. Sandmaier. Journal of the Electrochemical Society, 137 (2): 3947-3951 (1990)Best exemplars of English velar stops: a first report.K. Davis, and P. Kuhl. ICSLP, ISCA, (1992)A new multiple-kernel-learning weighting method for localizing human brain magnetic activity.T. Takiguchi, T. Imada, R. Takashima, Y. Ariki, J. Lin, P. Kuhl, M. Kawakatsu, and M. Kotani. ICASSP, page 761-764. IEEE, (2012)Grammatical Processing without Semantics? An Event-related Brain Potential Study of Preschoolers using Jabberwocky Sentences.J. Silva-Pereyra, B. Conboy, L. Klarman, and P. Kuhl. J. Cognitive Neuroscience, 19 (6): 1050-1065 (2007)