a.SiC films: deposition and application in silicon micromachining
A. Klumpp, K. Kühl, W. Lang, H. Sandmaier, and U. Schaber. Micro system technologies '94 : 4th International Conference on Micro Electro, Opto, Mechanical Systems and Components, page 289-298. Berlin, VDE-Verl., (1994)
Please log in to take part in the discussion (add own reviews or comments).
Cite this publication
More citation styles
- please select -
%0 Conference Paper
%1 klumpp1994films
%A Klumpp, A.
%A Kühl, K.
%A Lang, W.
%A Sandmaier, Hermann
%A Schaber, U.
%B Micro system technologies '94 : 4th International Conference on Micro Electro, Opto, Mechanical Systems and Components
%C Berlin
%D 1994
%E Reichl, Herbert
%E Heuberger, Anton
%I VDE-Verl.
%K
%P 289-298
%T a.SiC films: deposition and application in silicon micromachining
%@ 3-8007-2058-2
@inproceedings{klumpp1994films,
added-at = {2023-09-01T10:42:03.000+0200},
address = {Berlin},
author = {Klumpp, A. and Kühl, K. and Lang, W. and Sandmaier, Hermann and Schaber, U.},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2b589d029aff00c62701632fd9c162bab/unibiblio-4},
booktitle = {Micro system technologies '94 : 4th International Conference on Micro Electro, Opto, Mechanical Systems and Components},
editor = {Reichl, Herbert and Heuberger, Anton},
eventdate = {1994-10-19/1994-10-21},
eventtitle = {4th International Conference on Micro Electro, Opto, Mechanical Systems and Components},
interhash = {9ea72112bb8e0a763d03caa5e4b6b422},
intrahash = {b589d029aff00c62701632fd9c162bab},
isbn = {3-8007-2058-2},
keywords = {},
language = {eng},
pages = {289-298},
publisher = {VDE-Verl.},
timestamp = {2023-09-01T08:42:03.000+0200},
title = {a.SiC films: deposition and application in silicon micromachining},
venue = {Berlin},
year = 1994
}
