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Bulk micromachining using doping dependent p-n junction etch-stop

U. Schaber, H. Offereins, K. Kühl, H. Gronegger, S. Vogel, and H. Sandmaier. Proceedings of the Second International Symposium on Electrochemical Technology Applications in Electronics, 93-20, page 257-264. Pennington, NJ, Electrochemical Society, (1993)

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J. Vogel

J. Vogel

Jonas Vogelsang University of Stuttgart

S. Schumann

S. Seemann

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