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Micromirrors in Bulk Silicon Technology and Modelling

, , , , , and . The 7th Micromechanics Europe Workshop - MME '96 : proceedings, Barcelona, Universitat, (1996)

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Hardware & Software: Digitale Bildanalyse., and . LOG IN, 16 (2): 64- (1996)Learning Strategy and Students' Perception of Different Learning Options in a Blended Learning Environment - A Case Study of a First Year Engineering Course.. CSEDU, page 321-330. SciTePress, (2013)Parallel Discovery of Transcription Factor Binding Sites., and . APCCAS, page 700-703. IEEE, (2006)Thaddeus: a dual device interaction space for exploring information visualisation, , , , and . (2014)Modular system for laser microfabrication, , , , , , , , and . Micro system technologies '96 : 5th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, September 17-19, 1996, page 585-590. Berlin, VDE-Verl., (1996)3D microstructures in silicon using laser induced dry etching, , , and . Micro system technologies 96, page 633-638. Berlin, VDE-Verl., (1996)Temperaturgesteuertes Laserlöten, , , and . CEC '98 : Tagungsband, 49, Ditzingen, Dt. Ges. für Chronometrie, (1998)Ein erweitertes Modell für Paging-Trommeln., and . Computing, 23 (2): 99-118 (1979)Development of micromachined switches with increased reliability, , , and . Transducers 97 : digest of technical papers, 2, page 1157-1160. Piscataway, NJ, IEEE, (1997)Micromirrors in Bulk Silicon Technology and Modelling, , , , , and . The 7th Micromechanics Europe Workshop - MME '96 : proceedings, Barcelona, Universitat, (1996)