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Micromirrors in Bulk Silicon Technology and Modelling

H. Pavlicek, N. Hey, T. Strobelt, B. Schmidt, H. Sandmaier, and W. Lang. The 7th Micromechanics Europe Workshop - MME '96 : proceedings, Barcelona, Universitat, (1996)

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Dr. rer. nat. Nicolai Lang University of Stuttgart

Lukas Lang University of Stuttgart

Walter Ganz University of Stuttgart

Prof. Dr. -Ing. Walter Schönwandt University of Stuttgart

Jeremias Lange University of Stuttgart

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