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Modular system for laser microfabrication

, , , , , , , , and . Micro system technologies '96 : 5th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, September 17-19, 1996, page 585-590. Berlin, VDE-Verl., (1996)

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3D microstructures in silicon using laser induced dry etching, , , and . Micro system technologies 96, page 633-638. Berlin, VDE-Verl., (1996)Local Laser Bonding for low Temperature Budget, , , , , and . Selected papers from Transducers '01 Eurosensors XV, 97/98, page 422-427. Amsterdam, Elsevier, (2002)Modular system for laser microfabrication, , , , , , , , and . Micro system technologies '96 : 5th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, September 17-19, 1996, page 585-590. Berlin, VDE-Verl., (1996)Fuzzy general linear systems., , and . Applied Mathematics and Computation, 169 (1): 34-40 (2005)On Constraint Qualifications and Sensitivity Analysis for General Optimization Problems via Pseudo-Jacobians., , and . J. Optimization Theory and Applications, 179 (3): 778-799 (2018)A new wideband beamforming by fuzzy system for coherent signals., , , and . Digital Signal Processing, (2020)Fast state estimation subject to random data loss in discrete-time nonlinear stochastic systems., and . Int. J. Control, 86 (12): 2302-2314 (2013)An electrochemical model-based particle filter approach for Lithium-ion battery estimation., , and . CDC, page 3074-3079. IEEE, (2012)Inversion-free decentralised quantitative feedback design of large-scale systems., and . Int. J. Systems Science, 47 (8): 1772-1782 (2016)Fault Detection in Nonlinear Stable Systems Over Lossy Networks., and . IEEE Trans. Contr. Sys. Techn., 21 (6): 2129-2142 (2013)