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Evaluation of DAVED - Microgyros realized with a new 50 um SOI - based technology

, , , , , , , , , and . Symposium Gyro Technology 2003, Stuttgart, Univ., Institut A für Mechanik, (2003)

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Convection-based micromachined inclinometer using SOI technology, , , , , , , , and . Technical digest, MEMS 2001, the 14th IEEE International Conference on Micro Electro Mechanical Systems, page 159-161. Piscataway, NJ, IEEE Operations Center, (2001)Mikromechanische Drehratensensoren für Kfz-Anwendungen, , , , , , , , , and . Begleittexte zum Entwicklerforum Kfz-Elektronik, Poing, Design & Elektronik, (2002)Evaluation of DAVED - Microgyros realized with a new 50 um SOI - based technology, , , , , , , , , and . Symposium Gyro Technology 2003, Stuttgart, Univ., Institut A für Mechanik, (2003)Micromachined inclinometer with high sensitivity and very good stability, , , , , , , , and . Sensors and Actuators. A, Physical, (2002)Micromachined inclinometer with high sensitivity and very good stability, , , , , , , , and . Transducers '01 Eurosensors XV, page 1488-1492. Berlin, Springer, (2001)