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Micromachined inclinometer with high sensitivity and very good stability

, , , , , , , , and . Transducers '01 Eurosensors XV, page 1488-1492. Berlin, Springer, (2001)

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Thermal flow sensor for liquids and gases, , , , , and . Micro-electro-mechanical systems (MEMS) 1998 : micro-manufacturing processes in MEMS and other advanced systems, applications of micro-fabrication to fluid mechanics, micro-electro-mechanical systems, computational methods for analysis, design and simulation of MEMS, 66, page 351-355. New York, N.Y., American Soc. of Mechanical Engineers, (1998)Calculations on micromachined electro-thermal devices, , , , , , and . Conference proceedings, 18. CAD-FEM Users' Meeting 2000, Internationale FEM-Technologietage, page 1.4.4. Grafing, CAD-FEM, (2000)Convection-based micromachined inclinometer using SOI technology, , , , , , , , and . Technical digest, MEMS 2001, the 14th IEEE International Conference on Micro Electro Mechanical Systems, page 159-161. Piscataway, NJ, IEEE Operations Center, (2001)Thermal flow sensor for liquids and gases based on combinations of two principles, , , , , and . Sensors and Actuators. A, Physical, 73 (1/2): 7-13 (1999)Micromachined inclinometer with high sensitivity and very good stability, , , , , , , , and . Sensors and Actuators. A, Physical, (2002)Micromachined inclinometer with high sensitivity and very good stability, , , , , , , , and . Transducers '01 Eurosensors XV, page 1488-1492. Berlin, Springer, (2001)