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Evaluation of DAVED - Microgyros realized with a new 50 um SOI - based technology

, , , , , , , , , and . Symposium Gyro Technology 2003, Stuttgart, Univ., Institut A für Mechanik, (2003)

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Automated Design Flow for High Performance Micromachined Inertial Sensors, , , , , , and . Conference proceedings / 21st CAD-FEM Users' Meeting 2003 - International Congress on FEM Technology, Grafing b. München, CAD-FEM GmbH, (2003)Evaluation of DAVED - Microgyros realized with a new 50 um SOI - based technology, , , , , , , , , and . Symposium Gyro Technology 2003, Stuttgart, Univ., Institut A für Mechanik, (2003)A new self-test and self-calibration concept for micro-machined gyroscopes, , , , , , and . Transducers '05 : Seoul, Korea, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems; Digest of Technical Papers, 1, page 401-404. Piscataway, NJ, IEEE, (2005)