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Mikrostrukturierung mit porösem Silizium

, , , and . Sensoren : Technologie und Anwendung : Vorträge der ITG-Fachtagung, 126, Berlin, Vde-Verl., (1994)

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The Thermal Conductivity of porous Silicon, , , and . Microcrystalline and nanocrystalline semiconductors, 358, Pittsburgh, Pa., Materials Research Society, (1995)Absolute pressure switches with low contact resistance, , , and . Sensor 97 : proceedings, 3, page 143-147. Wunstorf, ACS Organisations, (1997)Porous silicon light-emitting P-N junction, , , and . Light emission from silicon, 57, 1/6, page 169-173. Amsterdam, North-Holland, (1993)Fabrication of microarrays on an industrial scale with TopSpot, , , and . MST news : international magazine on smart systems technologies, 2000 (4): 22-23 (2000)Bulk micromachining using doping dependent p-n junction etch-stop, , , , , and . Proceedings of the Second International Symposium on Electrochemical Technology Applications in Electronics, 93-20, page 257-264. Pennington, NJ, Electrochemical Society, (1993)Development and simulation of a silicon-based pressure sensor with digital output, , , , and . Micromechanics Europe (MME), 2nd Workshop on Micromachining, Micromechanics and Microsystems, Berlin, Germany, 26 - 27 November 1990, Berlin (1990), Berlin, (1990)Messung der Temperaturleitfähigkeit der Elektronik, and . Verbindungstechnik in der Elektronik : Vorträge und Poster-Beiträge des 6. Internationalen Kolloquiums, 141, Düsseldorf, DVS-Verl., (1992)Micro Electro Mechanical Systems: From Research to Applications, and . Japanese Journal of Applied Physics. Part 1, Regular papers, brief communications & review papers, 37 (12B): 7047-7051 (1998)Mikrosensorik - Überblick, Trends, Sicherheitsaspekte, and . Mikroelektronik und Sicherheit : Vorträge der GME-Fachtagung, 7, Berlin, Vde-Verl., (1990)Systemtechnik für Chemosensoren, , and . Mikro-Elektronik, 5 (3): 40-42 (1991)