Development and simulation of a silicon-based pressure sensor with digital output
J. Anton, U. Steger, C. Dominguez, J. Samitier, and H. Sandmaier. Micromechanics Europe (MME), 2nd Workshop on Micromachining, Micromechanics and Microsystems, Berlin, Germany, 26 - 27 November 1990, Berlin (1990), Berlin, (1990)
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