%0 Journal Article %1 stefanov2014structure %A Stefanov, Stefan %A Serra, Carmen %A Benedetti, Alessandro %A Conde, Jorge Carlos %A Werner, Jens %A Oehme, Michael %A Schulze, Jörg %A Wirths, Stephan %A Buca, Dan %A Chiussi, Stefano %D 2014 %I Elsevier BV %J Microelectronic Engineering %K %P 18-21 %R 10.1016/j.mee.2014.03.017 %T Structure and composition of Silicon-Germanium-Tin microstructures obtained through Mask Projection assisted Pulsed Laser Induced Epitaxy %V 125

@article{stefanov2014structure, added-at = {2023-08-31T14:54:16.000+0200}, author = {Stefanov, Stefan and Serra, Carmen and Benedetti, Alessandro and Conde, Jorge Carlos and Werner, Jens and Oehme, Michael and Schulze, Jörg and Wirths, Stephan and Buca, Dan and Chiussi, Stefano}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2bb7e3cdefb269e07ecd83c2847450725/puma-wartung}, doi = {10.1016/j.mee.2014.03.017}, interhash = {e8bd232379961a1560dc187d651e3791}, intrahash = {bb7e3cdefb269e07ecd83c2847450725}, issn = {0167-9317}, journal = {Microelectronic Engineering}, keywords = {}, language = {eng}, pages = {18-21}, publisher = {Elsevier BV}, timestamp = {2023-08-31T12:54:16.000+0200}, title = {Structure and composition of Silicon-Germanium-Tin microstructures obtained through Mask Projection assisted Pulsed Laser Induced Epitaxy}, volume = 125, year = 2014 }