Focused ion beam writing of submicron structures into coated mold inserts
H. Ruehl, M. Haub, S. Sahakalkan, T. Guenther, und A. Zimmermann. Proceedings of the 21st international conference of the european society for precision engineering and nanotechnology, Seite 137-140. european society for precision engineering and nanotechnology, (Juni 2021)
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%0 Conference Paper
%1 ruehl2021focused
%A Ruehl, Holger
%A Haub, Michael
%A Sahakalkan, Serhat
%A Guenther, Thomas
%A Zimmermann, André
%B Proceedings of the 21st international conference of the european society for precision engineering and nanotechnology
%D 2021
%K
%P 137-140
%T Focused ion beam writing of submicron structures into coated mold inserts
%@ 978-0-9957751-9-0
@inproceedings{ruehl2021focused,
added-at = {2022-09-24T13:18:56.000+0200},
author = {Ruehl, Holger and Haub, Michael and Sahakalkan, Serhat and Guenther, Thomas and Zimmermann, André},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2d067dbafee338545d7c9af05b05aa236/holgerruehl},
booktitle = {Proceedings of the 21st international conference of the european society for precision engineering and nanotechnology},
eventdate = {June 7th to June 10th 2021},
eventtitle = {21st International Conference & Exhibition},
interhash = {acdc066c86b71ae944d83aea3d24d962},
intrahash = {d067dbafee338545d7c9af05b05aa236},
isbn = {978-0-9957751-9-0},
keywords = {},
language = {english},
month = {6},
organization = {european society for precision engineering and nanotechnology},
pages = {137-140},
timestamp = {2022-09-24T11:18:56.000+0200},
title = {Focused ion beam writing of submicron structures into coated mold inserts},
year = 2021
}
