%0 Conference Paper %1 oehme2018sigesn %A Oehme, Michael %A Schwarz, D. %A Schulze, Jörg %A Clausen, Caterina J. %A Fischer, Inga A. %B Silicon Photonics : From Fundamental Research to Manufacturing %D 2018 %E Baets, Roel G. %E O'Brian, Peter %E Vivien, Laurent %I SPIE %K %N 10686 %R 10.1117/12.2318011 %T SiGeSn material for integrated optical devices %@ 978-1-5106-1898-5 and 978-1-5106-1899-2

@inproceedings{oehme2018sigesn, added-at = {2023-08-31T14:58:39.000+0200}, author = {Oehme, Michael and Schwarz, D. and Schulze, Jörg and Clausen, Caterina J. and Fischer, Inga A.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/277acc236918e20b9a324fcd60d39e818/puma-wartung}, booktitle = {Silicon Photonics : From Fundamental Research to Manufacturing}, doi = {10.1117/12.2318011}, editor = {Baets, Roel G. and O'Brian, Peter and Vivien, Laurent}, eventdate = {2018-04-22/2018-04-26}, eventtitle = {SPIE Photonics Europe, 2018}, interhash = {1b7f6f0fa2d6e0b16e07205d01eb8dda}, intrahash = {77acc236918e20b9a324fcd60d39e818}, isbn = {{978-1-5106-1898-5} and {978-1-5106-1899-2}}, keywords = {}, language = {eng}, number = 10686, publisher = {SPIE}, series = {Proceedings of SPIE}, timestamp = {2023-08-31T12:58:39.000+0200}, title = {SiGeSn material for integrated optical devices}, venue = {Strasbourg}, year = 2018 }