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An Ultra-low Thermal-budget SiGe-base Bipolar Technology

, , , , , , , and . Digest of technical papers : 1993 Symposium on VLSI Technology : May 17 - 19, 1993, Kyoto, page 59-60. Piscataway, New Jersey, IEEE, (1993)
DOI: 10.1109/VLSIT.1993.760244

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