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Disambiguation of "Burghartz, J.N."

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Review of add-on process modules for high-frequency silicon technology

. Microelectronics Reliability, 45 (3): 409 - 418 (2005)
DOI: https://doi.org/10.1016/j.microrel.2004.12.002

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Univ. -Prof. Dr. -Ing. Joachim Burghartz University of Stuttgart

 

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