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Biomotor-based nanotransport system constructed by pick-and-place assembly of individual molecules., , , , and . IROS, page 5628-5633. IEEE, (2010)FPGA-Based Decentralized Control of Arrayed MEMS for Microrobotic Application., , , , and . IEEE Trans. Industrial Electronics, 54 (4): 1926-1936 (2007)Closed-loop control of silicon nanotweezers for improvement of sensitivity to mechanical stiffness measurement and bio-sensing on DNA molecules., , , , , , , and . IROS, page 1022-1027. IEEE, (2013)Contact Less Radio-frequencies Biosensor for Biological Parameters Analysis., , , , and . BIODEVICES, page 398-401. INSTICC Press, (2009)A MEMS-based interactive laser scanning display with a collocated laser range finder., , and . IEICE Electronic Express, 12 (10): 20150072 (2015)A study on process-compatibility in CMOS-first MEMS-last integration., , , , , , and . CICC, page 85-88. IEEE, (2008)A two-dimensional ƒ-θ micro optical lens scanner with electrostatic comb-drive XY-stage., , , , , and . IEICE Electronic Express, 2 (21): 542-547 (2005)An SOI bulk-micromachined dual SPDT RF-MEMS switch by layer-wise separation design of waveguide and switching mechanism., , , , , and . IEICE Electronic Express, 7 (2): 80-85 (2010)Fluidic self-alignment applied to a micro-fluidic system., , , and . IEICE Electronic Express, 3 (11): 227-232 (2006)Consideration on Contact Mechanism of YBaCuO Bulk Superconductor with Deposited Metal Layer., , , , , , and . IEICE Transactions, 90-C (7): 1421-1428 (2007)