%0 Conference Paper %1 conf/cicc/TakahashiMFSFIT08 %A Takahashi, Kazuhiro %A Mita, Makoto %A Fujita, Hiroyuki %A Suzuki, Kazuhiro %A Funaki, Hideyuki %A Itaya, Kazuhiko %A Toshiyoshi, Hiroshi %B CICC %D 2008 %I IEEE %K dblp %P 85-88 %T A study on process-compatibility in CMOS-first MEMS-last integration. %U http://dblp.uni-trier.de/db/conf/cicc/cicc2008.html#TakahashiMFSFIT08 %@ 978-1-4244-2018-6

@inproceedings{conf/cicc/TakahashiMFSFIT08, added-at = {2014-03-25T00:00:00.000+0100}, author = {Takahashi, Kazuhiro and Mita, Makoto and Fujita, Hiroyuki and Suzuki, Kazuhiro and Funaki, Hideyuki and Itaya, Kazuhiko and Toshiyoshi, Hiroshi}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2aa2928d60657dbbfbf395abf4269681e/dblp}, booktitle = {CICC}, crossref = {conf/cicc/2008}, ee = {http://dx.doi.org/10.1109/CICC.2008.4672026}, interhash = {9510c2ca1c20966ef77d06749e8dca38}, intrahash = {aa2928d60657dbbfbf395abf4269681e}, isbn = {978-1-4244-2018-6}, keywords = {dblp}, pages = {85-88}, publisher = {IEEE}, timestamp = {2016-02-02T12:54:39.000+0100}, title = {A study on process-compatibility in CMOS-first MEMS-last integration.}, url = {http://dblp.uni-trier.de/db/conf/cicc/cicc2008.html#TakahashiMFSFIT08}, year = 2008 }