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A study on process-compatibility in CMOS-first MEMS-last integration., , , , , , and . CICC, page 85-88. IEEE, (2008)Biomotor-based nanotransport system constructed by pick-and-place assembly of individual molecules., , , , and . IROS, page 5628-5633. IEEE, (2010)FPGA-Based Decentralized Control of Arrayed MEMS for Microrobotic Application., , , , and . IEEE Trans. Industrial Electronics, 54 (4): 1926-1936 (2007)Closed-loop control of silicon nanotweezers for improvement of sensitivity to mechanical stiffness measurement and bio-sensing on DNA molecules., , , , , , , and . IROS, page 1022-1027. IEEE, (2013)A MEMS-based interactive laser scanning display with a collocated laser range finder., , and . IEICE Electronic Express, 12 (10): 20150072 (2015)Contact Less Radio-frequencies Biosensor for Biological Parameters Analysis., , , , and . BIODEVICES, page 398-401. INSTICC Press, (2009)Toward realization of transmissive display by MEMS etalon., , and . IEICE Electronic Express, 5 (9): 326-331 (2008)Electric contact stability of anti-wear probes., , , , , , and . IEICE Electronic Express, 9 (21): 1675-1682 (2012)Group work of distributed microactuators., , and . Robotica, 14 (5): 487-492 (1996)Two-dimensional conveyance system using cooperative motions of many microactuators., and . IROS, page 988-992. IEEE, (1996)