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Mechanical Solution for Out-of-Plane Sensitivity Enhancement of CMOS MEMS Convective Accelerometers.

, , , , and . ICECS, page 301-304. IEEE, (2018)

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Towards on-line testing of MEMS using electro-thermal excitation., , , , and . European Test Symposium, page 76-81. IEEE Computer Society, (2005)Mechanical Solution for Out-of-Plane Sensitivity Enhancement of CMOS MEMS Convective Accelerometers., , , , and . ICECS, page 301-304. IEEE, (2018)A Behavioral Model of MEMS Convective Accelerometers for the Evaluation of Design and Calibration Strategies at System Level., , , , and . J. Electronic Testing, 27 (3): 411-423 (2011)A novel method for test and calibration of capacitive accelerometers with a fully electrical setup., , , , and . DDECS, page 304-309. IEEE Computer Society, (2008)A Closed-Loop Architecture with Digital Output for Convective Accelerometers., , , and . ISVLSI, page 51-56. IEEE Computer Society, (2008)Study of First-Order Thermal Sigma-Delta Architecture for Convective Accelerometers, , , and . CoRR, (2008)Study of an Electrical Setup for Capacitive MEMS Accelerometers Test and Calibration., , , and . J. Electronic Testing, 26 (1): 111-125 (2010)Fully Electrical Post-Fabrication Trimming of Resistive Sensors., , , and . Sensors, 22 (3): 767 (2022)Rejection of Power Supply Noise in Wheatstone Bridges : Application to Piezoresistive MEMS, , , , and . CoRR, (2008)Sensitivity and power modeling of CMOS mems single axis convective accelerometers., , , , , and . Microelectronics Journal, 44 (12): 1092-1098 (2013)