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Spiral inductors and transmission lines in silicon technology using copper-damascene interconnects and low-loss substrates

, , , and . IEEE Transactions on Microwave Theory and Techniques, 45 (10): 1961-1968 (October 1997)
DOI: 10.1109/22.641804

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Spiral Inductors On Silicon : Status And Trends. International Journal of RF and Microwave computer-aided engineering, 8 (6): 422-432 (November 1998)RF Passives on Silicon : The Intended and the Unintended. Lehrgang, (October 2006)Permeability and Resonance Frequency of Patterned Magnetic Thin Films, , , and . (2001)Wafer-Level Chip-Scale Packaging for RF Applications, , , , and . (2003)Power Amplifier Optimization for Mobile Application by Second Harmonic Control, , , , and . page 471-475. (2002)Status and Trends of Silicon RF Technology. ESSDERC '99 : proceedings of the 29th European Solid-State Device Research Conference : Leuven, Belgium, 13-15 September, 1999, page 56-63. Paris, Editions Frontières, (1999)Opportunities for Standard Silicon Technology in RF&Microwave Applications, , , , , , and . ESSDERC '95 : proceedings of the 25th European Solid State Device Research Conference, The Netherlands Congress Centre, The Hague, The Netherlands, 25th - 27th September 1995, page 363-367. Gif-sur-Yvette, Éditions Frontières, (1995)Novel Bipolar Transistor Isolation Structure Using Combined Selective Epitaxial Growth and Planarization Technique, , , , , , , , , and 2 other author(s). Proceedings of the 22nd European Solid State Device Research Conference Leuven, 14-17 September 1992, page 531-534. Amsterdam, Elsevier, (1992)Multilevel Monolithic Inductors in Silicon Technology, , , , , and . Electronics Letters, 31 (5): 359-360 (March 1995)A low-capacitance bipolar/BiCMOS isolation technology : II : Circuit performance and device self-heating, , and . IEEE Transactions on Electron Devices, 41 (8): 1388-1395 (August 1994)