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Anisotropic conductive adhesion of microsensors applied in the instance of a low pressure sensor

, , , , and . Transducers '01 Eurosensors XV : digest of technical papers, 1, page 210-213. Berlin, Springer, (2001)
DOI: 10.1007/978-3-642-59497-7_49

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Anisotropic conductive adhesion of microsensors applied in the instance of a low pressure sensor, , , , and . Transducers '01 Eurosensors XV : digest of technical papers, 1, page 210-213. Berlin, Springer, (2001)Anisotropic conductive adhesion of microsensors applied in the instance of a low pressure sensor, , , , and . Sensors and actuators. A Physical, (2002)Liquid Mass Flow Sensor using dynamic Pressure Detection, , , and . Micro-electro-mechanical systems (MEMS) - 1998 : presented at the 1998 ASME International Mechanical Engineering Congress and Exposition, 66, page 421-426. New York, NY, ASME, (1998)