%0 Conference Paper %1 briegel2001anisotropic %A Briegel, R. %A Ashauer, M. %A Ashauer, H. %A Hermann, Sandmaier %A Lang, W. %B Transducers '01 Eurosensors XV : digest of technical papers %C Berlin %D 2001 %E Obermeier, Ernst %I Springer %K %P 210-213 %R 10.1007/978-3-642-59497-7_49 %T Anisotropic conductive adhesion of microsensors applied in the instance of a low pressure sensor %V 1 %X An assembly technology that has received little attention up to now in the area of microsensors is anisotropic conductive sticking, which is already state-of-the-art in the bonding of LCD displays. This procedure was investigated for a microsensors' application and used for a low pressure sensor as a practical example. In addition to an improvement in the tolerance to ambient media, the temperature-dependent offset drift could be reduced by a factor of about 10. %@ 978-3-540-42150-4 and 978-3-642-59497-7

@inproceedings{briegel2001anisotropic, abstract = {An assembly technology that has received little attention up to now in the area of microsensors is anisotropic conductive sticking, which is already state-of-the-art in the bonding of LCD displays. This procedure was investigated for a microsensors' application and used for a low pressure sensor as a practical example. In addition to an improvement in the tolerance to ambient media, the temperature-dependent offset drift could be reduced by a factor of about 10.}, added-at = {2023-09-01T10:41:57.000+0200}, address = {Berlin}, author = {Briegel, R. and Ashauer, M. and Ashauer, H. and Hermann, Sandmaier and Lang, W.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/26bc169426be3628a86d72746db934a48/unibiblio-4}, booktitle = {Transducers '01 Eurosensors XV : digest of technical papers}, doi = {10.1007/978-3-642-59497-7_49}, editor = {Obermeier, Ernst}, eventdate = {2001-06-10/2001-06-14}, eventtitle = {11th International Conference on Solid-State Sensors and Actuators}, interhash = {5dbd00d276738688c2976320d763443c}, intrahash = {6bc169426be3628a86d72746db934a48}, isbn = {{978-3-540-42150-4} and {978-3-642-59497-7}}, keywords = {}, language = {eng}, pages = {210-213}, publisher = {Springer}, timestamp = {2023-09-01T08:41:57.000+0200}, title = {Anisotropic conductive adhesion of microsensors applied in the instance of a low pressure sensor}, venue = {Munich, Germany}, volume = 1, year = 2001 }